Nanocomposite W-C:H diamond-like carbon coatings

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It has been demonstrated that the rotation speed of the substrate table and the gas flow rate of acetylene gas are important process parameters for determining the nano/micro-structure of W-C:H coatings. Either a homogeneous or a pronounced multilayer or a nanocomposite structure of the W-C:H coatings can be obtained by varying the substrate table rotation speed. At low rotation speeds, a pronounced multilayered structure will be deposited and by increasing the speed, a more homogeneous nanocomposite structure will be deposited. At 3 rpm substrate rotation speed, the multilayered structure of the W-C:H coatings will be completely suppressed and it will appear as a homogeneous nanocomposite in structure by high resolution cross-section TEM. By changing the gas flow rate of acetylene, the wavelength of the multilayer structure will change.

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