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Silicon containing polymers fot chemocally amplified resist applications.

(1995) Puyenbroek, Robert

Continuously, there is a demand for faster and more powerful processors resulting in the design of microelectronic devices that could satisfy the requirements of the users. The capacity of a processor i s considerablyd etermined by the integrated circuit (IC) used. The smallerthe size of the individual lements, the faster the device and the more operationist can perform.

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http://irs.ub.rug.nl/ppn/135774179

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